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R-Etc-uniformit-1sigma-<10%Etc-rat-(A/min-：>10/mi-fo-Therma-SiO-Mechanica-partical-(>0.6um-<80D-bia-(V<60-Fil-Thickness-8000+/-800-Shee-Resistance-38.5+/-10m&Omega-/-Depositio-uniformity-<5-(1sigma-Stress-<4E-Reflectivit>210%Mechanica-particl<20Fil-part
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