仪器参数
Integrated air isolation system，一体化气浮抗震系统。Motorized z-focus,Z轴自动对焦附件。Live video monitor，实时监视器。Vertical Measurement Range 0.1nm to 10mm,垂直测量范围0.1nm-1mm.Vertical Resolution 1 ＜1A Ra，垂直分辨率＜1A Ra。RMS Repeateatability 0.01mn（PZT）RMS重现性 0.01mn（PZT）Vertical scan
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